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Plasma etching of non-oxide ceramics

✍ Scribed by M. Mitomo; Y. Sato; I. Yashima; M. Tsutsumi

Book ID
104908098
Publisher
Springer
Year
1991
Tongue
English
Weight
704 KB
Volume
10
Category
Article
ISSN
0261-8028

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## Abstract Oxide ceramic materials like alumina (Al~2~O~3~) and zirconia (ZrO~2~) are frequently used for medical applications like implants and prostheses because of their excellent biocompatibility and high wear resistance. Unfortunately, oxide ceramics cannot be used for minimal invasive thin‐w