✦ LIBER ✦
Plasma etching of NiFe/Cu and NiMnSb/Al2O3 multilayers for sub-micron pattern definition
✍ Scribed by K.B Jung; J Hong; J.R Childress; S.J Pearton; F Sharifi; M Jenson; A.T Hurst Jr.
- Book ID
- 114229650
- Publisher
- Elsevier Science
- Year
- 1999
- Tongue
- English
- Weight
- 145 KB
- Volume
- 198-199
- Category
- Article
- ISSN
- 0304-8853
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