✦ LIBER ✦
Plasma etching of dielectric films using the non-global-warming gas CF3I
✍ Scribed by A. Misra; J. Sees; L. Hall; R.A. Levy; V.B. Zaitsev; K. Aryusook; C. Ravindranath; V. Sigal; S. Kesari; D. Rufin
- Book ID
- 117358407
- Publisher
- Elsevier Science
- Year
- 1998
- Tongue
- English
- Weight
- 123 KB
- Volume
- 34
- Category
- Article
- ISSN
- 0167-577X
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