✦ LIBER ✦

Plasma Etching of Aluminum

✍ Scribed by Danner, D. A.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Plasma etch chemistry of aluminum and al

✍ Dennis W. Hess 📂 Article 📅 1982 🏛 Springer 🌐 English ⚖ 774 KB

Aluminum etching in boron tribromide pla

✍ Keaton, A. Landauer 📂 Article 📅 1985 🏛 AVS (American Vacuum Society) 🌐 English ⚖ 680 KB

Plasma-assisted etching of aluminum in C

✍ R. d'Agostino; P. Capezzuto; F. Cramarossa; F. Fracassi 📂 Article 📅 1989 🏛 Springer 🌐 English ⚖ 709 KB

Thin oxide charging current during plasm

✍ Shin, H.; King, C.-C.; Horiuchi, T.; Hu, C. 📂 Article 📅 1991 🏛 IEEE 🌐 English ⚖ 242 KB

Aluminum etching

📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 115 KB

Aluminum etch

📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 319 KB