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Plasma etch and deposition monitoring with an oscillating quartz crystal

✍ Scribed by AR Nyaiesh; MA Baker

Publisher: Elsevier Science
Year: 1982
Tongue: English
Weight: 295 KB
Volume: 32
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(82)93819-2

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