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Plasma-enhanced chemical vapordeposition SiO2film after ion implantation induces quantum well intermixing

✍ Scribed by Peng Jucun; Wu Boying; Chen Jie; Zhao Jie; Wang Yongchen


Book ID
105631542
Publisher
Wuhan University of Technology
Year
2006
Tongue
English
Weight
256 KB
Volume
21
Category
Article
ISSN
1000-2413

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