✦ LIBER ✦
Plasma-Enhanced Atomic Layer Deposition of Semiconductor Grade ZnO Using Dimethyl Zinc
✍ Scribed by Pieter C. Rowlette; Cary G. Allen; Olivia B. Bromley; Amy E. Dubetz; Colin A. Wolden
- Publisher
- John Wiley and Sons
- Year
- 2009
- Tongue
- English
- Weight
- 230 KB
- Volume
- 15
- Category
- Article
- ISSN
- 0948-1907
No coin nor oath required. For personal study only.