✦ LIBER ✦
Plasma emission controlled multi-target reactive sputtering for in-situ crystallized Pb(Zr,Ti)O3 thin films on 6″ Si-wafers
✍ Scribed by V.S. Vidyarthi; W.-M. Lin; G. Suchaneck; G. Gerlach; C. Thiele; V. Hoffmann
- Book ID
- 108289512
- Publisher
- Elsevier Science
- Year
- 2007
- Tongue
- English
- Weight
- 745 KB
- Volume
- 515
- Category
- Article
- ISSN
- 0040-6090
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