Plasma Dynamics in Low-Pressure Capacitively Coupled Oxygen Plasma Using PIC–MCC/Fluid Hybrid Model

✍ Scribed by Bera, Kallol; Rauf, Shahid; Collins, Ken

• Book ID: 120364542
• Publisher: IEEE
• Year: 2011
• Tongue: English
• Weight: 552 KB
• Volume: 39
• Category: Article
• ISSN: 0093-3813
• DOI: 10.1109/TPS.2011.2159030