Plasma Diagnostics. Surface Analysis and Interactions

✍ Scribed by Orlando Auciello and Daniel L. Flamm (Eds.)

• Publisher: Academic Press
• Year: 1989
• Tongue: English
• Leaves: 343
• Edition: 1
• Category: Library

✦ Synopsis

Plasmas and their interaction with materials have become subjects of major interest because of their importance in modern forefront technologies such as microelectronics, fusion energy, and space. Plasmas are used in microelectronics to process semiconductors (etching of patterns for microcircuits, plasma-induced deposition of thin films, etc.); plasmas produce deleterious erosion effects on surfaces of materials used for fusion devices and spaceships exposed to the low earth environment.
Diagnostics of plasmas and materials exposed to them are fundamental to the understanding of the physical and chemical phenomena involved. Plasma Diagnostics provides a comprehensive treatment of the subject.
short version, TJE_
Plasmas and their interaction with materials have become subjects of major interest because of their importance in modern forefront technologies such as microelectronics, fusion energy, and space. Diagnostics of plasmas and materials exposed to them are fundamental to the understanding of the physical and chemical phenomena involved. Plasma Diagnostics provides a comprehensive treatment of the subject

✦ Table of Contents

Content:
Plasma-Materials Interactions, Page ii
Front Matter, Page iii
Copyright, Page iv
Contributors, Page vii
Preface, Pages ix-x, Orlando Auciello, Daniel L. Flamm
1 - Quartz Crystal Microbalances for Studies of Plasma-Surface Interactions, Pages 1-18, J.W. Coburn
2 - Elemental Analysis of Treated Surfaces, Pages 19-66, Donald L. Smith, H.P. Gillis, Thomas M. Mayer
3 - Spectroscopic Ellipsometry in Plasma Processing, Pages 67-108, D.E. Aspnes, R.P.H. Chang
4 - Ion Beam Analysis of Plasma-Exposed Surfaces, Pages 109-156, B.L. Doyle, Wei-Kan Chu
5 - The Interpretation of Plasma Probes for Fusion Experiments, Pages 157-209, P.C. Stangeby
6 - Analysis of Surfaces Exposed to Plasmas by Nondestructive Photoacoustic and Photothermal Techniques, Pages 211-326, B.K. Bein, J. Pelzl
Index, Pages 327-337
Plasma–Materials Interactions, Page ibc1