Plasma diagnostics of pulsed d.c. glow discharge combined with ICP for deep nitriding process

✍ Scribed by Yoon-Kee Kim; Jong-Moon Baek; Keun-Ho Lee

• Book ID: 108422872
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 341 KB
• Volume: 142-144
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/s0257-8972(01)01083-0