Plasma deposition of amorphous silicon-based materials: Edited by: Giovanni Bruno, Pio Capezzuto and Arun Madan A volume from the series on: Plasma-materials interactions, Edited by Orlando Auciello and Daniel L Flamm. Academic Press Inc. California USA, (Acadamic Press Ltd. London) 1995, 325 pp. ISBN-0-12-137940-X £85.00

✍ Scribed by W. Steckelmacher

• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 131 KB
• Volume: 47
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/s0042-207x(96)93889-0