✦ LIBER ✦
Plasma Chemical Study of a RF Discharge Containing Aluminum Tri-Isoproxide Using MIR Absorption Spectroscopy Based on External-Cavity Quantum Cascade Lasers
✍ Scribed by D. Lopatik; S. Niemietz; M. Fröhlich; J. Röpcke; H. Kersten
- Book ID
- 115554938
- Publisher
- John Wiley and Sons
- Year
- 2012
- Tongue
- English
- Weight
- 220 KB
- Volume
- 52
- Category
- Article
- ISSN
- 0005-8025
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