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Plasma-aided hydrogenation and Al-doping: Increasing the conductivity and optical transparency of ZnO transparent conducting oxide

โœ Scribed by T. Ong; L. Xu; T.A. van der Laan; S. Xu; K. Ostrikov


Book ID
116244504
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
693 KB
Volume
257
Category
Article
ISSN
0169-4332

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## Abstract In order to achieve good conductivity and high transmittance of transparent conductive oxide (TCO), we attempted to fabricate Mgโ€doped ZnO:Al (AZO) films and analyzed their structural, electrical, and optical properties. The Mgโ€doped AZO films were successfully deposited on top of the g