✦ LIBER ✦
Planarized multilevel interconnection using chemical mechanical polishing of selective CVD-Al via plugs
✍ Scribed by Amazawa, T.; Yamamoto, E.; Arita, Y.
- Book ID
- 114537229
- Publisher
- IEEE
- Year
- 1998
- Tongue
- English
- Weight
- 178 KB
- Volume
- 45
- Category
- Article
- ISSN
- 0018-9383
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