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Planarization of gold and aluminum thin films using a pulsed laser

✍ Scribed by Tuckerman, D.B.; Weisberg, A.H.

Book ID
121297500
Publisher
IEEE
Year
1986
Tongue
English
Weight
764 KB
Volume
7
Category
Article
ISSN
0741-3106

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Laser micromachining on 1000 nm-thick gold ΓΏlm using femtosecond laser has been studied. The laser pulses that are used for this study are 400 nm in central wavelength, 150 fs in pulse duration, and the repetition rate is 1 kHz. Plano-concave lens with a focal length of 19 mm focuses the laser beam