Planarization of diamond thin film surfaces by ion beam etching at grazing incidence angle

✍ Scribed by Ilias, S.; Sené, G.; Möller, P.; Stambouli, V.; Pascallon, J.; Bouchier, D.; Gicquel, A.; Tardieu, A.; Anger, E.; Ravet, M.F.

• Book ID: 120018162
• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 444 KB
• Volume: 5
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/0925-9635(95)00412-2