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Planar ZrO2waveguides prepared by the sol-gel process: Structural and optical properties

✍ Scribed by C. Urlacher; J. Dumas; J. Serughetti; J. Mugnier; M. Munoz


Publisher
Springer
Year
1997
Tongue
English
Weight
755 KB
Volume
8
Category
Article
ISSN
0928-0707

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The present study focused on ZnO thin films fabricated by sol-gel process and spin coated onto Si (1 0 0) and quartz substrates. ZnO thin films have a hexagonal wu Β¨rtzite structure with a grain diameter about 50 nm. Optical properties were determined by photoluminescence (PL) and absorption spectro