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Plan view TEM sample preparation for non-continuous and delaminating thin films

✍ Scribed by Weaver, Louise


Book ID
101226694
Publisher
John Wiley and Sons
Year
1997
Tongue
English
Weight
102 KB
Volume
36
Category
Article
ISSN
1059-910X

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✦ Synopsis


The preparation of plan view samples for TEM examination is generally a straightforward process except where the film delaminates from the substrate or is non-continuous. A method is described where film is first stabilised using an epoxy, then transferred to an aperature grid and ion milled to produce an electron transparent sample. This technique provides a relatively simple and fast method to prepare these types of films, using the standard equipment and supplies found in most TEM sample preparation laboratories.