✦ LIBER ✦
Piezoelectric unimorph miroactuators with X-shaped structure composed of PZT thin films
✍ Scribed by Isaku Kanno; Yoshiro Tazawa; Takaaki Suzuki; Hidetoshi Kotera
- Book ID
- 106185185
- Publisher
- Springer-Verlag
- Year
- 2007
- Tongue
- English
- Weight
- 447 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0946-7076
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