✦ LIBER ✦
Piezoelectric thin films formed by MOD on cantilever beams for micro sensors and actuators
✍ Scribed by T. Cui; D. Markus; S. Zurn; D. L. Polla
- Publisher
- Springer-Verlag
- Year
- 2004
- Tongue
- English
- Weight
- 273 KB
- Volume
- 10
- Category
- Article
- ISSN
- 0946-7076
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