Piezoelectric thin films for MEMS applications—A comparative study of PZT, 0.7PMN–0.3PT and 0.9PMN–0.1PT thin films grown on Si by r.f. magnetron sputtering

✍ Scribed by Romain Herdier; M. Detalle; David Jenkins; Caroline Soyer; Denis Remiens

• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 903 KB
• Volume: 148
• Category: Article
• ISSN: 0924-4247
• DOI: 10.1016/j.sna.2008.07.021