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Piezoelectric thin films: evaluation of electrical and electromechanical characteristics for MEMS devices

✍ Scribed by Prume, K.; Muralt, P.; Calame, F.; Schmitz-Kempen, T.; Tiedke, S.

Book ID
119995448
Publisher
IEEE
Year
2007
Tongue
English
Weight
404 KB
Volume
54
Category
Article
ISSN
0885-3010

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We report the fabrication and characterization of layer-by-layer self-assembled single-walled carbon nanotube (SWNT) thin films on plastic substrates. The SWNT multilayers are alternating layers of SWNTs and poly(dimethyldiallylammonium chloride) (PDDA). The SWNTs are deposited on the pre-patterned