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Piezoelectric Multilayer Beam Bending Actuators: Static and Dynamic Behavior and Aspects of Sensor Integration

✍ Scribed by Dr. Rüdiger G. Ballas (auth.)


Publisher
Springer-Verlag Berlin Heidelberg
Year
2007
Tongue
English
Leaves
366
Series
Microtechnology and Mems
Edition
1
Category
Library

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✦ Synopsis


An important aim of the presented book is the explanation of the application of piezoelectric materials such as piezoceramics within the wide field of electromechanical actuators and sensor technology. The reader should be presented the physical and mechanical properties of piezoceramics in a distinct way. In a next step, the reader is introduced into the mechanical description of the static behavior of piezoelectric multilayer beam bending actuators.

The description of the dynamic behavior of piezoelectric multilayered bending actuators is effected on the basis of Lagrangeβ€˜s formalism and Hamiltonβ€˜s principle. The achieved insights are used for the systematic development of the electromechanical circuit representation within the scope of the network theory for any design of piezoelectric bending actuators.

The applications of piezoelectric multilayer beam bending actuators can be extended by means of special displacement sensors allowing for the compensation of effects such as hysteresis, creep and drift being typical for piezoelectric actuators. Within the scope of the presented book, two different sensor-actuator-systems are presented being based on an integrated capacitive and inductive displacement sensor, respectively.

Analytical simulations of the static and dynamic behavior are compared to real measurement results of a specially developed piezoelectric multilayer beam bender. Here, the suitability of the developed theoretical aspects is shown in an outstanding way.

✦ Table of Contents


Front Matter....Pages I-XXIII
Front Matter....Pages 1-1
Introduction....Pages 3-13
Front Matter....Pages 15-15
Piezoelectric Materials....Pages 17-30
Linear Theory of Piezoelectric Materials....Pages 31-45
Theory of the Static Behavior of Piezoelectric Beam Bending Actuators....Pages 47-76
Piezoelectric Beam Bending Actuators and Hamilton’s Principle....Pages 77-102
Theory of the Dynamic Behavior of Piezoelectric Beam Bending Actuators....Pages 103-122
Network Representation of Piezoelectric Multilayered Bending Actuators....Pages 123-159
Front Matter....Pages 161-161
Measurement Setup for Piezoelectric Beam Bending Actuators....Pages 163-171
Measurements and Analytical Calculations....Pages 173-196
Front Matter....Pages 197-197
Piezoelectric Beam Bending Actuator with Integrated Sensor....Pages 199-202
Tip Deflection Measurement β€” Capacitive Sensor Principle....Pages 203-216
Tip Deflection Measurement β€” Inductive Sensor Principle....Pages 217-248
Conclusion....Pages 249-254
Back Matter....Pages 255-358

✦ Subjects


Electronics and Microelectronics, Instrumentation; Complexity; Control Engineering; Theoretical and Applied Mechanics; Optical and Electronic Materials


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