Piezoelectric micro-transformer based on PZT unimorph membrane
✍ Scribed by Vasic, Dejan; Sarraute, Emmanuel; Costa, François; Sangouard, Patrick; Cattan, Eric
- Book ID
- 119945320
- Publisher
- Institute of Physics
- Year
- 2004
- Tongue
- English
- Weight
- 386 KB
- Volume
- 14
- Category
- Article
- ISSN
- 0960-1317
No coin nor oath required. For personal study only.
📜 SIMILAR VOLUMES
A hybrid sol-gel-powder method was used to process 3-6 m thick lead zirconate titanate films via spin-coating a Ni-base alloy and silicon substrates. The films were crack free and possessed a fine microstructure. High effective piezoelectric coefficients, d 33 , of 250 pm/V were obtained from piezoe
## Abstract A MEMS‐based piezoelectric energy harvester was fabricated by bonding a piezoelectric ceramic Pb (Zr,Ti)O~3~ (PZT) plate to silicon wafer. The generator structure of a trapezoidal shape composite cantilever beam with nickel metal mass was designed. The novel fabrication techniques to ob