𝔖 Bobbio Scriptorium
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Piezoelectric circular microdiaphragm based pressure sensors

✍ Scribed by M. Olfatnia; T. Xu; J.M. Miao; L.S. Ong; X.M. Jing; L. Norford

Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
836 KB
Volume
163
Category
Article
ISSN
0924-4247

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✦ Synopsis

Pressure influences on the vibration characteristics of piezoelectric circular microdiaphragm based pressure sensors are investigated theoretically and experimentally. It was demonstrated that only Bessel function of zero order, m = 0, participates in the vibration modes of the microdiaphragm symmetrically loaded by pressure. The piezoelectric circular microdiaphragm was fabricated by combining sol-gel PZT thin film and MEMS technology. A high value of pressure sensitivity, as high as 280 Hz/mbar, has been achieved; this value is 2.43 times higher than the currently reported sensitivity (i.e., 115 Hz/mbar) in the literature.

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