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Piezoelectric bimorph charge mode force sensor

✍ Scribed by Olli Kursu; Arvi Kruusing; Marko Pudas; Timo Rahkonen

Book ID
108262996
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
909 KB
Volume
153
Category
Article
ISSN
0924-4247

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## Abstract Micro‐cantilevers are excellent tools to measure tiny forces (from 1 nN up to 10 ΞΌN) as shown by the development of atomic force microscopy (AFM) techniques. That is the reason why micro‐cantilevers are also the most sensitive acoustic sensors. For instance, one can use the variation of