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Piezoelectric actuated multiple channels optical switch

โœ Scribed by Gou-Jen Wang; Hong-Ru Liu

Book ID
106342298
Publisher
Springer
Year
2006
Tongue
English
Weight
402 KB
Volume
48
Category
Article
ISSN
0925-1030

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Silicon bulk micromachined electromechanical switches with four cantilever piezoelectric actuators
โœ Jae Yoeng Park; Hee Chul Lee; Chang Soo Yang ๐Ÿ“‚ Article ๐Ÿ“… 2007 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 312 KB

## Abstract In this article, silicon bulk micromachined RF MEMS switch with four cantilever piezoelectric actuators has been designed, fabricated, and characterized for advanced mobile/wireless communication systems. The proposed switch is comprised of four piezoelectric cantilever actuators, a con