Piezo-resistive pressure sensor applicable for in situ pressure measurement at cryogenic temperatures under magnetic fields
✍ Scribed by K. Nara; M. Okaji; H. Kato
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 648 KB
- Volume
- 33
- Category
- Article
- ISSN
- 0011-2275
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✦ Synopsis
A commercial piezo-resistive pressure sensor, PD116S, is reported to be suitable for use in a cryogenic environment. The temperature dependence of its pressure sensitivity, its stability after thermal cycling and its performance under magnetic fields of up to 8 T are studied to assess its applicability. Its pressure sensitivity changes by not more than 5% from room temperatures down to 6 K. Its characteristics are also found to stabilize after several thermal cycles between room temperature and liquid nitrogen temperature. The effect of the magnetic field on pressure sensitivity does not exceed 2% under a magnetic field of up to 8 T between 6 and 40 K.