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Picometer level displacement metrology with digitally enhanced heterodyne interferometry

✍ Scribed by de Vine, Glenn; Rabeling, David S.; Slagmolen, Bram J. J.; Lam, Timothy T-Y.; Chua, Sheon; Wuchenich, Danielle M.; McClelland, David E.; Shaddock, Daniel A.


Book ID
115410493
Publisher
Optical Society of America
Year
2009
Tongue
English
Weight
518 KB
Volume
17
Category
Article
ISSN
1094-4087

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