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Physicochemically modified silicon as a substrate for protein microarrays

✍ Scribed by A. Jasper Nijdam; Mark Ming-Cheng Cheng; David H. Geho; Roberta Fedele; Paul Herrmann; Keith Killian; Virginia Espina; Emanuel F. Petricoin III; Lance A. Liotta; Mauro Ferrari

Book ID
103825405
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
384 KB
Volume
28
Category
Article
ISSN
0142-9612

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## Abstract In this paper we present a three‐dimensional waveguide structure with unique optical and fluidic properties and demonstrate its application as a substrate for DNA microarrays. The structure is fabricated by thermal oxidation of a macroporous silicon membrane with a periodic pattern of d