Physico-chemical and electrical properties of rapid thermal oxides on Ge-rich SiGe heterolayers

✍ Scribed by R. Das; M.K. Bera; S. Chakraborty; S. Saha; J.F. Woitok; C.K. Maiti

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 870 KB
• Volume: 253
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2006.02.004