✦ LIBER ✦
Physical Vapor Deposition of Molecular Glass Photoresists: A New Route to Chemically Amplified Patterning
✍ Scribed by F. Pfeiffer; N. M. Felix; C. Neuber; C. K. Ober; H.-W. Schmidt
- Publisher
- John Wiley and Sons
- Year
- 2007
- Tongue
- English
- Weight
- 259 KB
- Volume
- 17
- Category
- Article
- ISSN
- 1616-301X
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