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Physical properties of carbon films produced using a hybrid physical vapour deposition technique

✍ Scribed by P. Holiday; A. Dehbi-Alaoui; A. Matthews


Book ID
103631635
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
688 KB
Volume
47
Category
Article
ISSN
0257-8972

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Superhard and tougher SiC/diamond-like-c
✍ X. Zhao; X. He; Y. Sun; J. Yi; P. Xiao πŸ“‚ Article πŸ“… 2009 πŸ› Elsevier Science 🌐 English βš– 958 KB

SiC/diamond-like carbon (DLC) composite films have been produced on metal substrates via electron beam physical vapour deposition process with various substrate temperatures. The films deposited at 700 Β°C contain a DLC matrix and nanocrystalline 3CASiC. However, the films deposited at 900 Β°C contain