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Physical Properties and Structure of rf-Sputtered Amorphous Films in the System Al2O3–Y2O3

✍ Scribed by Kentaro Fukuda; Teiichi Hanada; Setsuhisa Tanabe; Takeshi Yao


Book ID
108575154
Publisher
John Wiley and Sons
Year
2004
Tongue
English
Weight
139 KB
Volume
85
Category
Article
ISSN
0002-7820

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