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Physical models for coupled electromechanical analysis of silicon nanoelectromechanical systems

โœ Scribed by Z. Tang; Y. Xu; G. Li; N. R. Aluru


Book ID
126278317
Publisher
American Institute of Physics
Year
2005
Tongue
English
Weight
541 KB
Volume
97
Category
Article
ISSN
0021-8979

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