✦ LIBER ✦
Physical model for the evolution of the defect system of silicon carbide with allowance for the internal elastic stress fields during implantation of Al+and N+and subsequent annealing
✍ Scribed by D. V. Kulikov; Yu. V. Trushin; P. V. Rybin; V. S. Kharlamov
- Book ID
- 110121294
- Publisher
- Springer
- Year
- 1999
- Tongue
- English
- Weight
- 103 KB
- Volume
- 44
- Category
- Article
- ISSN
- 1063-7842
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