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Physical model and results of numerical simulation of the degradation of a Si/SiO2structure as a result of annealing in vacuum

✍ Scribed by G. V. Gadiyak; J. H. Stathis


Book ID
110119904
Publisher
Springer
Year
1998
Tongue
English
Weight
77 KB
Volume
32
Category
Article
ISSN
1063-7826

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