✦ LIBER ✦
Physical insight into ultra-shallow junction formation through atomistic modeling
✍ Scribed by L. Pelaz; M. Aboy; P. Lopez; L.A. Marques; I. Santos
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 298 KB
- Volume
- 253
- Category
- Article
- ISSN
- 0168-583X
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