Physical, electrical, and optical properties of SF-PECVD-grown hydrogenated microcrystalline silicon with growth surface electrical bias

✍ Scribed by Erik V. Johnson; Sjoerd Hoogland; Ethan Klem; Nazir Kherani; Stefan Zukotynski

• Book ID: 106397400
• Publisher: Springer US
• Year: 2006
• Tongue: English
• Weight: 448 KB
• Volume: 17
• Category: Article
• ISSN: 0957-4522
• DOI: 10.1007/s10854-006-0025-0