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Physical characterization of mixed HfAlOx layers by complementary analysis techniques

✍ Scribed by H Bender; Th Conard; O Richard; B Brijs; J Pétry; W Vandervorst; C Defranoux; P Boher; N Rochat; C Wyon; P Mack; J Wolstenholme; R Vitchev; L Houssiau; J-J Pireaux; A Bergmaier; G Dollinger

Book ID
108215033
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
267 KB
Volume
109
Category
Article
ISSN
0921-5107

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