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Physical aspects of ion-implantation : W. K. Hofker. Acta Electronica19 (1), 29 (1976). (In French only)

Book ID: 103272929
Publisher: Elsevier Science
Year: 1976
Tongue: English
Weight: 81 KB
Volume: 15
Category: Article
ISSN: 0026-2714
DOI: 10.1016/0026-2714(76)90598-9

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