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Physical aspects of ion beam assisted deposition

✍ Scribed by G.K. Hubler; C.A. Carosella; E.P. Donovan; D. Vanvechten; R.H. Bassel; T.D. Andreadis; M. Rosen; G.P. Mueller

Book ID: 113281144
Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 733 KB
Volume: 46
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(90)90734-c

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