✦ LIBER ✦
Physical and electrical characterization of polysilicon vs. TiN gate electrodes for HfO2 transistors
✍ Scribed by Patrick S. Lysaght; Jeff J. Peterson; Brendan Foran; Chadwin D. Young; Gennadi Bersuker; Howard R. Huff
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 511 KB
- Volume
- 7
- Category
- Article
- ISSN
- 1369-8001
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