Photon- and catalysis-assisted silicon oxynitridation at room temperature: a comparative study

✍ Scribed by A. Glachant; P. Soukiassian

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 521 KB
• Volume: 65-66
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(93)90735-t