✦ LIBER ✦
Photolytic silicon nitride deposition for gallium arsenide by 193 nm excimer laser radiation
✍ Scribed by K.M Eisele; W Rothemund; B Dischler
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 198 KB
- Volume
- 41
- Category
- Article
- ISSN
- 0042-207X
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