Study of the photoluminescence of amorph
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H. Rinnert; O. Jambois; M. Vergnat; M. Molinari
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Article
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2005
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Elsevier Science
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English
⚖ 399 KB
A simple reactive evaporation method is proposed to prepare light-emitting SiO x thin films. Pure silicon is evaporated in a controlled molecular oxygen atmosphere. By changing the pressure in the preparation chamber, x can be varied from 0.7 to 1.85. The samples were annealed in the range 350-1100