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Photoluminescence study of the structural evolution of amorphous and crystalline silicon nanoclusters during the thermal annealing of silicon suboxide films with different stoichiometry

✍ Scribed by D. M. Zhigunov; N. V. Shvydun; A. V. Emelyanov; V. Yu. Timoshenko; P. K. Kashkarov; V. N. Seminogov


Book ID
114992386
Publisher
Springer
Year
2012
Tongue
English
Weight
220 KB
Volume
46
Category
Article
ISSN
1063-7826

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A simple reactive evaporation method is proposed to prepare light-emitting SiO x thin films. Pure silicon is evaporated in a controlled molecular oxygen atmosphere. By changing the pressure in the preparation chamber, x can be varied from 0.7 to 1.85. The samples were annealed in the range 350-1100