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Photoluminescence investigation of III-V semiconductor surface damage induced by PECVD silicon nitride films
✍ Scribed by A. Piccirillo; R. Marzano; A.L. Gobbi; P.E. Bagnoli
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 675 KB
- Volume
- 52
- Category
- Article
- ISSN
- 0169-4332
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