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Photoluminescence and structural characterization of MeV erbium-implanted silica glass

✍ Scribed by A. Polman; D.C. Jacobson; A. Lidgard; J.M. Poate; G.W. Arnold

Book ID
113282051
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
373 KB
Volume
59-60
Category
Article
ISSN
0168-583X

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Structural and photoluminescence studies
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✍ Cerqueira, M. F. ;Alpuim, P. ;Filonovich, S. A. ;Alves, E. ;Rolo, A. G. ;Andres, 📂 Article 📅 2009 🏛 John Wiley and Sons 🌐 English ⚖ 230 KB

## Abstract Hydrogenated amorphous and nanocrystalline silicon thin films deposited by hot wire (HW) and radio‐frequency plasma‐enhanced chemical vapour deposition (RF‐PECVD) were erbium‐implanted. Their pre‐implantation structural properties and post‐implantation optical properties were studied an